Keyphrases
Multi-walled Carbon Nanotubes (MWCNTs)
41%
Carbon Nanotube Forest
40%
Graphene Foam
39%
Resonator
36%
Large Angle
34%
Carbon Nanotubes
31%
Vertically Aligned Carbon Nanotubes (VACNTs)
27%
Tilting Actuator
27%
Operating Principle
24%
Mechanical Properties
23%
Microdevice
22%
Nanoelectromechanical Systems
21%
Amplification Mechanism
20%
Silicon-on-insulator
20%
Boron Carbon Nitride
20%
Transformer
19%
Out-of-plane Motion
19%
Architecture Principles
19%
Novel Architectures
19%
Silicon-on-insulator Wafer
19%
Angular Motion
19%
Graphene
19%
Fabrication Methods
19%
Simple Fabrication Process
18%
Micro-electro-mechanical Systems
18%
Actuation
17%
Electrostatic Transducer
17%
Parallel Plates
17%
Tilt Angle
17%
Two Dimensional Materials
17%
Heat Dissipation
16%
Capacitance
16%
Two Dimensional
16%
Elastic Torsion
16%
Boron Nitride Foam
14%
MEMS Accelerometer
13%
Mechanical Amplification
13%
Gallium Telluride
13%
Proof Mass
13%
Displacement Measurement
13%
Gallium Sulfide
13%
Large Amplitude
13%
Monolayer MoS2
13%
Temperature Sensor
13%
Electromechanical Behavior
13%
Stretchability
13%
Transition Metal Dichalcogenides
13%
Energy Dissipation
13%
Graphene Resonator
13%
Electrostatically Actuated
12%
Material Science
Carbon Nanotube
100%
Resonator
65%
Graphene
58%
Microelectromechanical System
51%
Two-Dimensional Material
23%
Young's Modulus
22%
Boron Nitride
21%
Capacitance
21%
Gallium
20%
Transition Metal Dichalcogenide
20%
Boron
20%
Carbon Nitride
17%
Mechanical Property
17%
Monolayers
17%
Silicon
16%
Elastic Property
16%
Fracture Toughness
13%
Physical Property
12%
Poisson Ratio
11%
Mechanical Testing
9%
Optical Property
9%
Luminescence
8%
Surface (Surface Science)
8%
Morphology
8%
Nanocrystalline Material
8%
Thermal Load
8%
Thermal Expansion
8%
Forced Convection
7%
Rhenium
6%
Bismuth
6%
Contact Mechanics
6%
Accelerometer
6%
Sensitivity Enhancement
6%
Mechanical Strength
6%
Shear Strain
6%
Transition Metal
6%
Hafnium
6%
Carbon Dioxide
6%
Ductile Fracture
6%
Honeycomb Structure
6%
Electronic Property
6%
Nanosheet
6%
Laser-Induced Graphene
6%
Covalent Bond
6%
Chalcogenides
6%
Carrier Mobility
6%
Finite Element Method
6%
Oxide Compound
6%
Alloying
6%
Elasticity
6%
Engineering
Carbon Nanotube
79%
Microelectromechanical System
63%
Electrostatics
41%
Silicon on Insulator
33%
Actuation
28%
Nanoscale
23%
Transducer
18%
Amplifier
17%
Nanometre
15%
Plane Motion
15%
Parallel Plate
14%
Resonator
14%
Proof Mass
13%
Displacement Measurement
13%
Thermal Sensor
13%
Capacitive
11%
Experimental Result
11%
Micro-Electro-Mechanical System
10%
Poisson Ratio
10%
Digital Image Correlation
10%
Two Dimensional
10%
Dynamic Behavior
10%
Graphene
10%
Microfabrication
9%
Electrostatic Field
8%
Heat Losses
8%
Feasibility Study
8%
Young's Modulus
7%
Engineering
7%
Optoelectronics
6%
Parametric Excitation
6%
Fracture Strength
6%
Moment of Inertia
6%
Nanomaterial
6%
Electromechanical Behavior
6%
Single-Walled Carbon Nanotube
6%
Proximity Sensor
6%
Image Processing
6%
Damping Force
6%
Processing Technique
6%
System Temperature
6%
Microsensor
6%
Surface Topography
6%
Thermal Characterization
6%
Carbonitrides
6%
Nanoplatelet
6%
Laser-Induced Graphene
6%
Sliding Contact
6%
Friction Force
6%
Flat Surface
6%
