A compact real-time high-speed high-resolution vibrometer, surface profiler and dynamic focus tracker using three wavelengths parallel phase-shift interferometry

Amir Aizen, Michael Ney, Avner Safrani, Ibrahim Abdulhalim

    Research output: Contribution to journalArticlepeer-review

    14 Scopus citations

    Abstract

    The combination of simultaneous parallel phase shift interferometry with three wavelengths illumination and three spectral quad detectors integrated into a compact optical system is presented, achieving a real time, high speed, sub-nm axial resolution and repeatability tracking of axial position over tens of micrometers including sharp step profiles. The prototype system is tested and demonstrated for the applications of fast vibrometry up to 400 kHz rate, surface profiling and dynamic focus tracking and correction. The methodology, algorithm and calibration procedure along with the new compact and low-cost system design relying on off the shelf components, are described in detail.

    Original languageEnglish
    Pages (from-to)304-314
    Number of pages11
    JournalOptics and Lasers in Engineering
    Volume107
    DOIs
    StatePublished - 1 Aug 2018

    Keywords

    • Coherence and statistical optics
    • Interferometry
    • Measurement and metrology
    • Microscopy
    • Velocimetry
    • Vibration analysis

    ASJC Scopus subject areas

    • Electronic, Optical and Magnetic Materials
    • Atomic and Molecular Physics, and Optics
    • Mechanical Engineering
    • Electrical and Electronic Engineering

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