A comprehensive CMOS APS crosstalk study: Photoresponse model, technology, and design trends

Igor Shcherback, Tatiana Danov, Orly Yadid-Pecht

Research output: Contribution to journalArticlepeer-review

33 Scopus citations

Abstract

In this paper the lateral photoresponse and crosstalk (CTK) in complementary metal-oxide-semiconductor (CMOS) photodiodes is investigated by means of a unique sub-micron scanning system (S-cube system) and numerical device simulation. An improved semi-analytical model developed for photoresponse estimation of a photodiode-based CMOS active pixel sensor reveals the photosignal and the CTK dependence on the pixels geometrical shape and arrangement within the array. The trends that promise to increase CMOS image sensor performance are presented and design tradeoffs intended to optimize the photoresponse and minimize CTK are discussed.

Original languageEnglish
Pages (from-to)2033-2041
Number of pages9
JournalIEEE Transactions on Electron Devices
Volume51
Issue number12
DOIs
StatePublished - 1 Dec 2004

Keywords

  • Active pixel sensor (APS)
  • CMOS image sensor
  • Crosstalk
  • Diffusion process
  • Modeling
  • Parameter estimation

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering

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