TY - GEN
T1 - A MEMS device with sub-nanometer displacement sensing using carbon nanotubes
AU - Ya'akobovitz, Assaf
AU - Krylov, Slava
AU - Hanein, Yael
PY - 2010/12/1
Y1 - 2010/12/1
N2 - In this work we present, for the first time, an on-chip sub-nanometer displacement sensing scheme. The sensing is achieved using integrated single wall carbon nanotubes (SWCNTs) as the sensing element. A novel fabrication process was used to suspend SWCNTs in a micro electromechanical (MEMS) device and integrate them onto special MEMS stretching devices, which was used to apply controlled nanoscale stretching to the SWCNTs while monitoring their electrical resistivity. Experimental results show that the SWCNTs resistance significantly changed under sub-nanometer stretching, thus demonstrating the realization of an ultra-sensitive MEMS displacement sensor.
AB - In this work we present, for the first time, an on-chip sub-nanometer displacement sensing scheme. The sensing is achieved using integrated single wall carbon nanotubes (SWCNTs) as the sensing element. A novel fabrication process was used to suspend SWCNTs in a micro electromechanical (MEMS) device and integrate them onto special MEMS stretching devices, which was used to apply controlled nanoscale stretching to the SWCNTs while monitoring their electrical resistivity. Experimental results show that the SWCNTs resistance significantly changed under sub-nanometer stretching, thus demonstrating the realization of an ultra-sensitive MEMS displacement sensor.
UR - http://www.scopus.com/inward/record.url?scp=79951871560&partnerID=8YFLogxK
U2 - 10.1109/ICSENS.2010.5690793
DO - 10.1109/ICSENS.2010.5690793
M3 - Conference contribution
AN - SCOPUS:79951871560
SN - 9781424481682
T3 - Proceedings of IEEE Sensors
SP - 2447
EP - 2450
BT - IEEE Sensors 2010 Conference, SENSORS 2010
T2 - 9th IEEE Sensors Conference 2010, SENSORS 2010
Y2 - 1 November 2010 through 4 November 2010
ER -