A MEMS device with sub-nanometer displacement sensing using carbon nanotubes

Assaf Ya'akobovitz, Slava Krylov, Yael Hanein

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

In this work we present, for the first time, an on-chip sub-nanometer displacement sensing scheme. The sensing is achieved using integrated single wall carbon nanotubes (SWCNTs) as the sensing element. A novel fabrication process was used to suspend SWCNTs in a micro electromechanical (MEMS) device and integrate them onto special MEMS stretching devices, which was used to apply controlled nanoscale stretching to the SWCNTs while monitoring their electrical resistivity. Experimental results show that the SWCNTs resistance significantly changed under sub-nanometer stretching, thus demonstrating the realization of an ultra-sensitive MEMS displacement sensor.

Original languageEnglish
Title of host publicationIEEE Sensors 2010 Conference, SENSORS 2010
Pages2447-2450
Number of pages4
DOIs
StatePublished - 1 Dec 2010
Externally publishedYes
Event9th IEEE Sensors Conference 2010, SENSORS 2010 - Waikoloa, HI, United States
Duration: 1 Nov 20104 Nov 2010

Publication series

NameProceedings of IEEE Sensors

Conference

Conference9th IEEE Sensors Conference 2010, SENSORS 2010
Country/TerritoryUnited States
CityWaikoloa, HI
Period1/11/104/11/10

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