A multipurpose apparatus for studying the interaction of low energy ions with solid state surface

I. Terzić, N. Bundaleski, Z. Rakočević, N. Oklobdžija, J. Elazar

Research output: Contribution to journalArticlepeer-review

9 Scopus citations


A new concept of a multipurpose device for the investigation of a low energy in beam interactions with solid state surfaces is realized in an apparatus for surface analysis by means of low energy ion scattering (LEIS), direct recoil spectrometry (DRS), mass spectrometry of recoil ions (MRSI), and secondary-ion mass spectrometry (SIMS). This device provides broad alkali ion beams, homogeneous and much more intense than in standard commercial realizations available, as well as various high quality intense gas ion beams. A long tube with a magnetic quadrupole triplet is introduced. This construction disjoins the high vacuum from the ultrahigh vacuum (UHV) parts of the system and makes possible low cost differential pumping. The use of an UHV broad alkali ion beam in SIMS experiments should importantly decrease crater effect problems without use of rastering and electrical gating systems. In order to demonstrate the possibilities and the advantages of the proposed concept, we present the results of experimental analysis of primary ion beam characteristics, as well as LEIS and DRS experimental results obtained by use of gas ion beams scattered from silver polycrystalline surfaces. This design concept results in a simple and low cost device with operating characteristics comparable to those of high quality devices of similar type.

Original languageEnglish
Pages (from-to)4195-4200
Number of pages6
JournalReview of Scientific Instruments
Issue number11
StatePublished - 1 Jan 2000
Externally publishedYes

ASJC Scopus subject areas

  • Instrumentation


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