A NANOCOMPOSITE MOLD FOR THERMAL NANOIMPRINTING AND METHOD FOR PRODUCING THE SAME

Mark Schvartzman; Viraj Bhingardive; Liran Menahem

A NANOCOMPOSITE MOLD FOR THERMAL NANOIMPRINTING AND METHOD FOR PRODUCING THE SAME

Mark Schvartzman (Inventor)
, Viraj Bhingardive (Inventor)
, Liran Menahem (Inventor)

Department of Materials Engineering

Research output: Patent

Abstract

The invention relates to a nanocomposite elastic mold for thermal nanoimprint, the mold comprising an elastic substrate, to which a plurality of rigid individual nanofeatures are bonded. The bonding of the rigid individual nanofeatures to the elastic substrate is performed by a process which uses a sacrificial substrate and a sacrificial coating.

Original language	English
Patent number	WO2020012457
IPC	B32B 27/ 00 A I
Priority date	10/07/18
State	Published - 16 Jan 2020

Cite this

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title = "A NANOCOMPOSITE MOLD FOR THERMAL NANOIMPRINTING AND METHOD FOR PRODUCING THE SAME",

abstract = "The invention relates to a nanocomposite elastic mold for thermal nanoimprint, the mold comprising an elastic substrate, to which a plurality of rigid individual nanofeatures are bonded. The bonding of the rigid individual nanofeatures to the elastic substrate is performed by a process which uses a sacrificial substrate and a sacrificial coating.",

author = "Mark Schvartzman and Viraj Bhingardive and Liran Menahem",

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language = "English",

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AU - Schvartzman, Mark

AU - Bhingardive, Viraj

AU - Menahem, Liran

PY - 2020/1/16

Y1 - 2020/1/16

N2 - The invention relates to a nanocomposite elastic mold for thermal nanoimprint, the mold comprising an elastic substrate, to which a plurality of rigid individual nanofeatures are bonded. The bonding of the rigid individual nanofeatures to the elastic substrate is performed by a process which uses a sacrificial substrate and a sacrificial coating.

AB - The invention relates to a nanocomposite elastic mold for thermal nanoimprint, the mold comprising an elastic substrate, to which a plurality of rigid individual nanofeatures are bonded. The bonding of the rigid individual nanofeatures to the elastic substrate is performed by a process which uses a sacrificial substrate and a sacrificial coating.

M3 - Patent

M1 - WO2020012457

ER -

A NANOCOMPOSITE MOLD FOR THERMAL NANOIMPRINTING AND METHOD FOR PRODUCING THE SAME

Abstract

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