A novel dynamic process control scheme to improve cycle time in Fabs

Michael Hassoun

doi:10.1109/TSM.2016.2617895

A novel dynamic process control scheme to improve cycle time in Fabs

Michael Hassoun

Research output: Contribution to journal › Article › peer-review

1 Scopus citations

Abstract

Based on previous results showing the tradeoff existing between cycle time (CT) and yield in fabs we propose to dynamically set the control limits of the statistical process control. The limits are determined based on the current level of congestion. We study both a single station and a simple multiple station transfer line and show that the resulting operating points are vastly better in terms of CT, while keeping the yield loss at acceptable levels.

Original language	English
Article number	7592402
Pages (from-to)	32-38
Number of pages	7
Journal	IEEE Transactions on Semiconductor Manufacturing
Volume	30
Issue number	1
DOIs	https://doi.org/10.1109/TSM.2016.2617895
State	Published - 1 Feb 2017
Externally published	Yes

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

SDG 9 Industry, Innovation, and Infrastructure

Keywords

Semiconductor manufacturing
metrology
statistical process control

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Industrial and Manufacturing Engineering
Electrical and Electronic Engineering

Access to Document

10.1109/TSM.2016.2617895

Cite this

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abstract = "Based on previous results showing the tradeoff existing between cycle time (CT) and yield in fabs we propose to dynamically set the control limits of the statistical process control. The limits are determined based on the current level of congestion. We study both a single station and a simple multiple station transfer line and show that the resulting operating points are vastly better in terms of CT, while keeping the yield loss at acceptable levels.",

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AB - Based on previous results showing the tradeoff existing between cycle time (CT) and yield in fabs we propose to dynamically set the control limits of the statistical process control. The limits are determined based on the current level of congestion. We study both a single station and a simple multiple station transfer line and show that the resulting operating points are vastly better in terms of CT, while keeping the yield loss at acceptable levels.

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KW - metrology

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A novel dynamic process control scheme to improve cycle time in Fabs

Abstract

UN SDGs

Keywords

ASJC Scopus subject areas

Access to Document

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Cite this