A queuing network model for wafer fabrication using decomposition without aggregation

Dean Grosbard; Adar Kalir; Israel Tirkel; Gad Rabinowitz

doi:10.1109/CoASE.2013.6653941

A queuing network model for wafer fabrication using decomposition without aggregation

Dean Grosbard, Adar Kalir, Israel Tirkel, Gad Rabinowitz

Department of Industrial Engineering and Management

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

6 Scopus citations

Abstract

Deterministic capacity models and simulation models cannot fully comprehend the modern wafer fabrication facility's need for cycle time (CT) forecasts that are both accurate and rapid. Queuing networks, being stochastic yet analytical models, have the potential of providing sufficiently accurate 'on the spot' CT approximations. In this paper, we characterize a queuing network suited for fab modeling and then formulate a queuing network model for a mini-fab, using decomposition without aggregation method to yield CT approximations. Numerical results demonstrate that this proposed approach generates fairly accurate approximations with an average error of 7% compared to simulation results, better than other existing methods to date.

Original language	English
Title of host publication	2013 IEEE International Conference on Automation Science and Engineering, CASE 2013
Pages	717-722
Number of pages	6
DOIs	https://doi.org/10.1109/CoASE.2013.6653941
State	Published - 1 Dec 2013
Event	2013 IEEE International Conference on Automation Science and Engineering, CASE 2013 - Madison, WI, United States Duration: 17 Aug 2013 → 20 Aug 2013

Publication series

Name	IEEE International Conference on Automation Science and Engineering
ISSN (Print)	2161-8070
ISSN (Electronic)	2161-8089

Conference

Conference	2013 IEEE International Conference on Automation Science and Engineering, CASE 2013
Country/Territory	United States
City	Madison, WI
Period	17/08/13 → 20/08/13

ASJC Scopus subject areas

Control and Systems Engineering
Electrical and Electronic Engineering

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10.1109/CoASE.2013.6653941

Cite this

Grosbard, D., Kalir, A., Tirkel, I., & Rabinowitz, G. (2013). A queuing network model for wafer fabrication using decomposition without aggregation. In 2013 IEEE International Conference on Automation Science and Engineering, CASE 2013 (pp. 717-722). Article 6653941 (IEEE International Conference on Automation Science and Engineering). https://doi.org/10.1109/CoASE.2013.6653941

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title = "A queuing network model for wafer fabrication using decomposition without aggregation",

abstract = "Deterministic capacity models and simulation models cannot fully comprehend the modern wafer fabrication facility's need for cycle time (CT) forecasts that are both accurate and rapid. Queuing networks, being stochastic yet analytical models, have the potential of providing sufficiently accurate 'on the spot' CT approximations. In this paper, we characterize a queuing network suited for fab modeling and then formulate a queuing network model for a mini-fab, using decomposition without aggregation method to yield CT approximations. Numerical results demonstrate that this proposed approach generates fairly accurate approximations with an average error of 7% compared to simulation results, better than other existing methods to date.",

author = "Dean Grosbard and Adar Kalir and Israel Tirkel and Gad Rabinowitz",

year = "2013",

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doi = "10.1109/CoASE.2013.6653941",

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series = "IEEE International Conference on Automation Science and Engineering",

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Grosbard, D, Kalir, A, Tirkel, I & Rabinowitz, G 2013, A queuing network model for wafer fabrication using decomposition without aggregation. in 2013 IEEE International Conference on Automation Science and Engineering, CASE 2013., 6653941, IEEE International Conference on Automation Science and Engineering, pp. 717-722, 2013 IEEE International Conference on Automation Science and Engineering, CASE 2013, Madison, WI, United States, 17/08/13. https://doi.org/10.1109/CoASE.2013.6653941

A queuing network model for wafer fabrication using decomposition without aggregation. / Grosbard, Dean; Kalir, Adar; Tirkel, Israel et al.
2013 IEEE International Conference on Automation Science and Engineering, CASE 2013. 2013. p. 717-722 6653941 (IEEE International Conference on Automation Science and Engineering).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

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N2 - Deterministic capacity models and simulation models cannot fully comprehend the modern wafer fabrication facility's need for cycle time (CT) forecasts that are both accurate and rapid. Queuing networks, being stochastic yet analytical models, have the potential of providing sufficiently accurate 'on the spot' CT approximations. In this paper, we characterize a queuing network suited for fab modeling and then formulate a queuing network model for a mini-fab, using decomposition without aggregation method to yield CT approximations. Numerical results demonstrate that this proposed approach generates fairly accurate approximations with an average error of 7% compared to simulation results, better than other existing methods to date.

AB - Deterministic capacity models and simulation models cannot fully comprehend the modern wafer fabrication facility's need for cycle time (CT) forecasts that are both accurate and rapid. Queuing networks, being stochastic yet analytical models, have the potential of providing sufficiently accurate 'on the spot' CT approximations. In this paper, we characterize a queuing network suited for fab modeling and then formulate a queuing network model for a mini-fab, using decomposition without aggregation method to yield CT approximations. Numerical results demonstrate that this proposed approach generates fairly accurate approximations with an average error of 7% compared to simulation results, better than other existing methods to date.

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A queuing network model for wafer fabrication using decomposition without aggregation

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