A queuing network model for wafer fabrication using decomposition without aggregation

Dean Grosbard, Adar Kalir, Israel Tirkel, Gad Rabinowitz

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

4 Scopus citations

Abstract

Deterministic capacity models and simulation models cannot fully comprehend the modern wafer fabrication facility's need for cycle time (CT) forecasts that are both accurate and rapid. Queuing networks, being stochastic yet analytical models, have the potential of providing sufficiently accurate 'on the spot' CT approximations. In this paper, we characterize a queuing network suited for fab modeling and then formulate a queuing network model for a mini-fab, using decomposition without aggregation method to yield CT approximations. Numerical results demonstrate that this proposed approach generates fairly accurate approximations with an average error of 7% compared to simulation results, better than other existing methods to date.

Original languageEnglish
Title of host publication2013 IEEE International Conference on Automation Science and Engineering, CASE 2013
Pages717-722
Number of pages6
DOIs
StatePublished - 1 Dec 2013
Event2013 IEEE International Conference on Automation Science and Engineering, CASE 2013 - Madison, WI, United States
Duration: 17 Aug 201320 Aug 2013

Publication series

NameIEEE International Conference on Automation Science and Engineering
ISSN (Print)2161-8070
ISSN (Electronic)2161-8089

Conference

Conference2013 IEEE International Conference on Automation Science and Engineering, CASE 2013
Country/TerritoryUnited States
CityMadison, WI
Period17/08/1320/08/13

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Electrical and Electronic Engineering

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