A unique sub-micron scanning system use for CMOS APS crosstalk characterization

Igor Shcherback, Boris Belotserkovsky, Alex Belenky, Orly Yadid-Pecht

Research output: Contribution to journalConference articlepeer-review

14 Scopus citations


This paper presents the pioneer use of our unique Sub-micron Scanning System (SSS) for point spread function (PSF) and crosstalk (CTK) measurements of focal plane CMOS Active Pixel Sensor (APS) arrays. The system enables the combination of near-field optical and atomic force microscopy measurements with the standard electronic analysis. This SSS enables full PSF extraction for imagers via sub-micron spot light stimulation. This is unique to our system. Other systems provide Modulation Transfer Function (MTF) measurements, and cannot acquire the true PSF, therefore limiting the evaluation of the sensor and its performance grading. A full PSF is required for better knowledge of the sensor and its specific faults, and for research - to enable better optimization of pixel design and imager performance. In this work based on the thorough scanning of different "L" shaped active area pixel designs (the responsivity variation measurements on a subpixel scale) the full PSF was obtained and the crosstalk distributions of the different APS arrays are calculated. The obtained PSF points out the pronounced asymmetry of the diffusion within the array, mostly caused by the certain pixel architecture and the pixels arrangement within the array. We show that a reliable estimate of the CTK in the imager is possible; the PSF use for the CTK measurements enables not only its magnitude determination (that can be done by regular optical measurements), but also to discover its main causes, enabling the design optimization per each potential pixel application.

Original languageEnglish
Pages (from-to)136-147
Number of pages12
JournalProceedings of SPIE - The International Society for Optical Engineering
StatePublished - 15 Sep 2003
EventSensors and Camera Systems for Scientific, Industrial, and Digital Photography Applications IV - Santa Clara, CA, United States
Duration: 21 Jan 200323 Jan 2003


  • CMOS Active Pixel Sensor (APS)
  • Crosstalk (CTK)
  • Diffusion process
  • Modeling
  • Modulation Transfer Function (MTF)
  • Point spread Function (PSF)

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering


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