TY - GEN
T1 - Analytical model for optimal inspection frequency with consideration of setup inspections
AU - Berger, Kfir
AU - Bar-Gera, Hillel
AU - Kalir, Adar
AU - Rabinowitz, Gad
PY - 2007/12/1
Y1 - 2007/12/1
N2 - Inspections are an essential component of the production process in semiconductor fabrication facilities. Inspection frequency influences the process yield as well as the production cost. It is therefore important to identify the optimal frequency by considering both aspects together. Several methods have been proposed in the literature for identifying optimal inspection frequencies. These methods assume that inspections occur only according to a single static rule of a constant predetermined frequency. In reality, inspections may occur due to other reasons, for example after every setup change, and are not necessarily static. In this paper we discuss the effect of setup inspections on the decisions about regular inspections. We show how to modify the basic model for inspection costs and excursion costs in view of setup inspections. We further show how to determine the optimal frequency in this case using our proposed model. We then discuss the potential benefits from using a dynamic inspection rule that makes inspection decisions with consideration of the expected number of batches until the next setup change.
AB - Inspections are an essential component of the production process in semiconductor fabrication facilities. Inspection frequency influences the process yield as well as the production cost. It is therefore important to identify the optimal frequency by considering both aspects together. Several methods have been proposed in the literature for identifying optimal inspection frequencies. These methods assume that inspections occur only according to a single static rule of a constant predetermined frequency. In reality, inspections may occur due to other reasons, for example after every setup change, and are not necessarily static. In this paper we discuss the effect of setup inspections on the decisions about regular inspections. We show how to modify the basic model for inspection costs and excursion costs in view of setup inspections. We further show how to determine the optimal frequency in this case using our proposed model. We then discuss the potential benefits from using a dynamic inspection rule that makes inspection decisions with consideration of the expected number of batches until the next setup change.
UR - http://www.scopus.com/inward/record.url?scp=44449134793&partnerID=8YFLogxK
U2 - 10.1109/COASE.2007.4341693
DO - 10.1109/COASE.2007.4341693
M3 - Conference contribution
AN - SCOPUS:44449134793
SN - 1424411548
SN - 9781424411542
T3 - Proceedings of the 3rd IEEE International Conference on Automation Science and Engineering, IEEE CASE 2007
SP - 1081
EP - 1086
BT - Proceedings of the 3rd IEEE International Conference on Automation Science and Engineering, IEEE CASE 2007
T2 - 3rd IEEE International Conference on Automation Science and Engineering, IEEE CASE 2007
Y2 - 22 September 2007 through 25 September 2007
ER -