Annealing of niobium coatings deposited on graphite

S. Barzilai; A. Raveh; N. Frage

doi:10.1016/j.vacuum.2005.03.005

Annealing of niobium coatings deposited on graphite

S. Barzilai, A. Raveh, N. Frage

Department of Materials Engineering

Research output: Contribution to journal › Article › peer-review

10 Scopus citations

Abstract

Niobium coatings 8-12 μm thick were deposited by magnetron sputtering on ATJ graphite substrate. The kinetic growth of carbide layers into niobium coatings and the properties of the Nb₂C and NbC phases obtained after annealing in the temperature range of 1073-1773 K were studied. It was found that the carbide layer growth displayed parabolic behavior patterns establishing the growth rate constants (K) of Nb₂C and NbC layers, as follows:KNb2C=3.7×10-8exp(-190kJRT)m2s;KNbC=4.5×10-9exp(-164kJRT) m2s.

Original language	English
Pages (from-to)	171-177
Number of pages	7
Journal	Vacuum
Volume	79
Issue number	3-4
DOIs	https://doi.org/10.1016/j.vacuum.2005.03.005
State	Published - 19 Aug 2005

Keywords

Annealing
Coating
Niobium carbide
Sputtering

ASJC Scopus subject areas

Instrumentation
Condensed Matter Physics
Surfaces, Coatings and Films

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10.1016/j.vacuum.2005.03.005

Cite this

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title = "Annealing of niobium coatings deposited on graphite",

abstract = "Niobium coatings 8-12 μm thick were deposited by magnetron sputtering on ATJ graphite substrate. The kinetic growth of carbide layers into niobium coatings and the properties of the Nb2C and NbC phases obtained after annealing in the temperature range of 1073-1773 K were studied. It was found that the carbide layer growth displayed parabolic behavior patterns establishing the growth rate constants (K) of Nb2C and NbC layers, as follows:KNb2C=3.7×10-8exp(-190kJRT)m2s;KNbC=4.5×10-9exp(-164kJRT) m2s.",

keywords = "Annealing, Coating, Niobium carbide, Sputtering",

author = "S. Barzilai and A. Raveh and N. Frage",

note = "Funding Information: The authors wish to thank Mr. Avi Ben-Shabat for his expert technical assistance, and Mr. E. Boublil for SEM micro-graphs. This work was supported by a grant from the Israeli Council of High Education and the Israeli Atomic Energy Commission.",

year = "2005",

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doi = "10.1016/j.vacuum.2005.03.005",

language = "English",

volume = "79",

pages = "171--177",

journal = "Vacuum",

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TY - JOUR

T1 - Annealing of niobium coatings deposited on graphite

AU - Barzilai, S.

AU - Raveh, A.

AU - Frage, N.

N1 - Funding Information: The authors wish to thank Mr. Avi Ben-Shabat for his expert technical assistance, and Mr. E. Boublil for SEM micro-graphs. This work was supported by a grant from the Israeli Council of High Education and the Israeli Atomic Energy Commission.

PY - 2005/8/19

Y1 - 2005/8/19

N2 - Niobium coatings 8-12 μm thick were deposited by magnetron sputtering on ATJ graphite substrate. The kinetic growth of carbide layers into niobium coatings and the properties of the Nb2C and NbC phases obtained after annealing in the temperature range of 1073-1773 K were studied. It was found that the carbide layer growth displayed parabolic behavior patterns establishing the growth rate constants (K) of Nb2C and NbC layers, as follows:KNb2C=3.7×10-8exp(-190kJRT)m2s;KNbC=4.5×10-9exp(-164kJRT) m2s.

AB - Niobium coatings 8-12 μm thick were deposited by magnetron sputtering on ATJ graphite substrate. The kinetic growth of carbide layers into niobium coatings and the properties of the Nb2C and NbC phases obtained after annealing in the temperature range of 1073-1773 K were studied. It was found that the carbide layer growth displayed parabolic behavior patterns establishing the growth rate constants (K) of Nb2C and NbC layers, as follows:KNb2C=3.7×10-8exp(-190kJRT)m2s;KNbC=4.5×10-9exp(-164kJRT) m2s.

KW - Annealing

KW - Coating

KW - Niobium carbide

KW - Sputtering

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U2 - 10.1016/j.vacuum.2005.03.005

DO - 10.1016/j.vacuum.2005.03.005

M3 - Article

AN - SCOPUS:22544451867

SN - 0042-207X

VL - 79

SP - 171

EP - 177

JO - Vacuum

JF - Vacuum

IS - 3-4

ER -

Annealing of niobium coatings deposited on graphite

Abstract

Keywords

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