Annealing of niobium coatings deposited on graphite

S. Barzilai, A. Raveh, N. Frage

Research output: Contribution to journalArticlepeer-review

9 Scopus citations

Abstract

Niobium coatings 8-12 μm thick were deposited by magnetron sputtering on ATJ graphite substrate. The kinetic growth of carbide layers into niobium coatings and the properties of the Nb2C and NbC phases obtained after annealing in the temperature range of 1073-1773 K were studied. It was found that the carbide layer growth displayed parabolic behavior patterns establishing the growth rate constants (K) of Nb2C and NbC layers, as follows:KNb2C=3.7×10-8exp(-190kJRT)m2s;KNbC=4.5×10-9exp(-164kJRT) m2s.

Original languageEnglish
Pages (from-to)171-177
Number of pages7
JournalVacuum
Volume79
Issue number3-4
DOIs
StatePublished - 19 Aug 2005

Keywords

  • Annealing
  • Coating
  • Niobium carbide
  • Sputtering

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