Anomalous X-ray scattering from bulk microdefects

X-ray anomalous scattering measured with a high-resolution triple-crystal diffractometer was analysed in terms of different models of microdefects present in the bulk of InP crystal. The observed broadening of the Laue reflections is consistent with the formation of large aggregations of dislocation loops belonging to {111}{110) system. The complete simulation of the diffuse intensity including both Huang and Stokes-Wilson regions in comparison with the experimental data revealed that these aggregations consist of vacancy loops occupying predominantly the (111) plane and that the rest of the {111} planes are occupied by the interstitial loops.