APPARATUS AND METHODS FOR DETECTING OVERLAY ERRORS USING SCATTEROMETRY

Michael Adel (Inventor), Walter D Mieher (Inventor), Mark Ghinovker (Inventor), Michael Adel (Inventor), Walter D Mieher (Inventor), Ibrahim Abdulhalim (Inventor), Ady Levy (Inventor), Michael Friedmann (Inventor)

    Research output: Patent

    Fingerprint

    Dive into the research topics of 'APPARATUS AND METHODS FOR DETECTING OVERLAY ERRORS USING SCATTEROMETRY'. Together they form a unique fingerprint.

    Keyphrases

    Physics

    Engineering