Abstract
New micro-optical elements, arrays of micro-prisms and micro-mirrors for infra-red light with a wide variation of their parameters were fabricated. These results were obtained with a three-component As-S-Se chalcogenide photoresist and a new efficient amine-based selective developer.
| Original language | English |
|---|---|
| Pages (from-to) | 2275-2280 |
| Number of pages | 6 |
| Journal | Journal of Optoelectronics and Advanced Materials |
| Volume | 7 |
| Issue number | 5 |
| State | Published - 1 Jan 2005 |
Keywords
- AsS -AsSe photoresist
- Infrared
- Micro-mirror array
- Micro-prism aray
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Atomic and Molecular Physics, and Optics
- Condensed Matter Physics
- Electrical and Electronic Engineering