As2S3 based arrays of large-size IR microlenses

N. P. Eisenberg, M. Manevich, A. Arsh, M. Klebanov, V. Lyubin

Research output: Contribution to journalArticlepeer-review

16 Scopus citations


An increase of microlens dimensions in IR microlens arrays, based on chalcogenide glassy films, was achieved using thermal reflow method with a new selective developer for thick As2S3 films.

Original languageEnglish
Pages (from-to)405-407
Number of pages3
JournalJournal of Optoelectronics and Advanced Materials
Issue number2
StatePublished - 1 Jan 2002


  • Chalcogenide glassy films
  • Chalcogenide photoresists
  • Microlens arrays

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Condensed Matter Physics
  • Electrical and Electronic Engineering


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