As2S3 based arrays of large-size IR microlenses

N. P. Eisenberg; M. Manevich; A. Arsh; M. Klebanov; V. Lyubin

As₂S₃ based arrays of large-size IR microlenses

N. P. Eisenberg, M. Manevich, A. Arsh, M. Klebanov, V. Lyubin

Department of Physics

Research output: Contribution to journal › Article › peer-review

18 Scopus citations

Abstract

An increase of microlens dimensions in IR microlens arrays, based on chalcogenide glassy films, was achieved using thermal reflow method with a new selective developer for thick As₂S₃ films.

Original language	English
Pages (from-to)	405-407
Number of pages	3
Journal	Journal of Optoelectronics and Advanced Materials
Volume	4
Issue number	2
State	Published - 1 Jan 2002

Keywords

Chalcogenide glassy films
Chalcogenide photoresists
Microlens arrays

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Atomic and Molecular Physics, and Optics
Condensed Matter Physics
Electrical and Electronic Engineering

Cite this

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title = "As2S3 based arrays of large-size IR microlenses",

abstract = "An increase of microlens dimensions in IR microlens arrays, based on chalcogenide glassy films, was achieved using thermal reflow method with a new selective developer for thick As2S3 films.",

keywords = "Chalcogenide glassy films, Chalcogenide photoresists, Microlens arrays",

author = "Eisenberg, {N. P.} and M. Manevich and A. Arsh and M. Klebanov and V. Lyubin",

year = "2002",

month = jan,

day = "1",

language = "English",

volume = "4",

pages = "405--407",

journal = "Journal of Optoelectronics and Advanced Materials",

issn = "1454-4164",

publisher = "National Institute of Optoelectronics",

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TY - JOUR

T1 - As2S3 based arrays of large-size IR microlenses

AU - Eisenberg, N. P.

AU - Manevich, M.

AU - Arsh, A.

AU - Klebanov, M.

AU - Lyubin, V.

PY - 2002/1/1

Y1 - 2002/1/1

N2 - An increase of microlens dimensions in IR microlens arrays, based on chalcogenide glassy films, was achieved using thermal reflow method with a new selective developer for thick As2S3 films.

AB - An increase of microlens dimensions in IR microlens arrays, based on chalcogenide glassy films, was achieved using thermal reflow method with a new selective developer for thick As2S3 films.

KW - Chalcogenide glassy films

KW - Chalcogenide photoresists

KW - Microlens arrays

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M3 - Article

AN - SCOPUS:0347840995

SN - 1454-4164

VL - 4

SP - 405

EP - 407

JO - Journal of Optoelectronics and Advanced Materials

JF - Journal of Optoelectronics and Advanced Materials

IS - 2

ER -

As₂S₃ based arrays of large-size IR microlenses

Abstract

Keywords

ASJC Scopus subject areas

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