Boron nitride coatings of steel and graphite produced with a low pressure r.f. plasma

O. Gafri; A. Grill; D. Itzhak; A. Inspektor; R. Avni

doi:10.1016/0040-6090(80)90542-8

Boron nitride coatings of steel and graphite produced with a low pressure r.f. plasma

O. Gafri, A. Grill, D. Itzhak, A. Inspektor, R. Avni

Department of Materials Engineering

Research output: Contribution to journal › Article › peer-review

38 Scopus citations

Abstract

Boron nitride (BN) coatings were deposited onto die steel and graphite substrates with a low pressure r.f. plasma. The coatings were deposited onto substrates at temperatures of 550–620 °C from a gas mixture of argon, NH₃ and BCl₃. X-ray diffraction and scanning electron microscopy were employed to identify and to characterize the coatings. The coatings are mostly amorphous; however, the existence of small amounts of hexagonal BN was identified. The influence on the growth rate of the deposition time and the pressure in the reactor is described.

Original language	English
Pages (from-to)	523-527
Number of pages	5
Journal	Thin Solid Films
Volume	72
Issue number	3
DOIs	https://doi.org/10.1016/0040-6090(80)90542-8
State	Published - 1 Jan 1980

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Surfaces and Interfaces
Surfaces, Coatings and Films
Metals and Alloys
Materials Chemistry

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10.1016/0040-6090(80)90542-8

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abstract = "Boron nitride (BN) coatings were deposited onto die steel and graphite substrates with a low pressure r.f. plasma. The coatings were deposited onto substrates at temperatures of 550–620 °C from a gas mixture of argon, NH3 and BCl3. X-ray diffraction and scanning electron microscopy were employed to identify and to characterize the coatings. The coatings are mostly amorphous; however, the existence of small amounts of hexagonal BN was identified. The influence on the growth rate of the deposition time and the pressure in the reactor is described.",

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AU - Gafri, O.

AU - Grill, A.

AU - Itzhak, D.

AU - Inspektor, A.

AU - Avni, R.

PY - 1980/1/1

Y1 - 1980/1/1

N2 - Boron nitride (BN) coatings were deposited onto die steel and graphite substrates with a low pressure r.f. plasma. The coatings were deposited onto substrates at temperatures of 550–620 °C from a gas mixture of argon, NH3 and BCl3. X-ray diffraction and scanning electron microscopy were employed to identify and to characterize the coatings. The coatings are mostly amorphous; however, the existence of small amounts of hexagonal BN was identified. The influence on the growth rate of the deposition time and the pressure in the reactor is described.

AB - Boron nitride (BN) coatings were deposited onto die steel and graphite substrates with a low pressure r.f. plasma. The coatings were deposited onto substrates at temperatures of 550–620 °C from a gas mixture of argon, NH3 and BCl3. X-ray diffraction and scanning electron microscopy were employed to identify and to characterize the coatings. The coatings are mostly amorphous; however, the existence of small amounts of hexagonal BN was identified. The influence on the growth rate of the deposition time and the pressure in the reactor is described.

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Boron nitride coatings of steel and graphite produced with a low pressure r.f. plasma

Abstract

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