Carbon nanotube self-assembeled high frequency resonator

Assaf Ya'akobovitz; Gabriel Karp; Moshe David-Pur; S. Krylov; Yael Hanein

doi:10.1109/MEMSYS.2010.5442472

Carbon nanotube self-assembeled high frequency resonator

Assaf Ya'akobovitz, Gabriel Karp, Moshe David-Pur, S. Krylov, Yael Hanein

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

3 Scopus citations

Abstract

We present a single wall carbon nanotube (SWCNT) based high frequency resonator fabricated using a novel process suitable for mass fabrication. The integration of the electrostatically actuated SWCNT into the silicon structure was achieved by a specially tailored fabrication process which is characterized by simplicity and compatibility with commonly used micro-machining processes. The fabrication process enables the control of the SWCNT positioning and its length and results in a taut and clean suspended SWCNT. Electro-mechanical testing of these devices demonstrates a resonance frequency of 13.4 MHz. Resonators with various resonance frequencies can be readily fabricated by varying the SWCNT length.

Original language	English
Title of host publication	MEMS 2010 - The 23rd IEEE International Conference on Micro Electro Mechanical Systems, Technical Digest
Pages	432-435
Number of pages	4
DOIs	https://doi.org/10.1109/MEMSYS.2010.5442472
State	Published - 1 Jun 2010
Externally published	Yes
Event	23rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2010 - Hong Kong, China Duration: 24 Jan 2010 → 28 Jan 2010

Publication series

Name	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN (Print)	1084-6999

Conference

Conference	23rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2010
Country/Territory	China
City	Hong Kong
Period	24/01/10 → 28/01/10

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Mechanical Engineering
Electrical and Electronic Engineering

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

Access to Document

10.1109/MEMSYS.2010.5442472

Cite this

Ya'akobovitz, A., Karp, G., David-Pur, M., Krylov, S., & Hanein, Y. (2010). Carbon nanotube self-assembeled high frequency resonator. In MEMS 2010 - The 23rd IEEE International Conference on Micro Electro Mechanical Systems, Technical Digest (pp. 432-435). Article 5442472 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). https://doi.org/10.1109/MEMSYS.2010.5442472

@inproceedings{2d968faf518a4571bafad24dfde5d143,

title = "Carbon nanotube self-assembeled high frequency resonator",

abstract = "We present a single wall carbon nanotube (SWCNT) based high frequency resonator fabricated using a novel process suitable for mass fabrication. The integration of the electrostatically actuated SWCNT into the silicon structure was achieved by a specially tailored fabrication process which is characterized by simplicity and compatibility with commonly used micro-machining processes. The fabrication process enables the control of the SWCNT positioning and its length and results in a taut and clean suspended SWCNT. Electro-mechanical testing of these devices demonstrates a resonance frequency of 13.4 MHz. Resonators with various resonance frequencies can be readily fabricated by varying the SWCNT length.",

author = "Assaf Ya'akobovitz and Gabriel Karp and Moshe David-Pur and S. Krylov and Yael Hanein",

year = "2010",

month = jun,

day = "1",

doi = "10.1109/MEMSYS.2010.5442472",

language = "English",

isbn = "9781424457649",

series = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",

pages = "432--435",

booktitle = "MEMS 2010 - The 23rd IEEE International Conference on Micro Electro Mechanical Systems, Technical Digest",

note = "23rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2010 ; Conference date: 24-01-2010 Through 28-01-2010",

}

Ya'akobovitz, A, Karp, G, David-Pur, M, Krylov, S & Hanein, Y 2010, Carbon nanotube self-assembeled high frequency resonator. in MEMS 2010 - The 23rd IEEE International Conference on Micro Electro Mechanical Systems, Technical Digest., 5442472, Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), pp. 432-435, 23rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2010, Hong Kong, China, 24/01/10. https://doi.org/10.1109/MEMSYS.2010.5442472

Carbon nanotube self-assembeled high frequency resonator. / Ya'akobovitz, Assaf; Karp, Gabriel; David-Pur, Moshe et al.
MEMS 2010 - The 23rd IEEE International Conference on Micro Electro Mechanical Systems, Technical Digest. 2010. p. 432-435 5442472 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - Carbon nanotube self-assembeled high frequency resonator

AU - Ya'akobovitz, Assaf

AU - Karp, Gabriel

AU - David-Pur, Moshe

AU - Krylov, S.

AU - Hanein, Yael

PY - 2010/6/1

Y1 - 2010/6/1

N2 - We present a single wall carbon nanotube (SWCNT) based high frequency resonator fabricated using a novel process suitable for mass fabrication. The integration of the electrostatically actuated SWCNT into the silicon structure was achieved by a specially tailored fabrication process which is characterized by simplicity and compatibility with commonly used micro-machining processes. The fabrication process enables the control of the SWCNT positioning and its length and results in a taut and clean suspended SWCNT. Electro-mechanical testing of these devices demonstrates a resonance frequency of 13.4 MHz. Resonators with various resonance frequencies can be readily fabricated by varying the SWCNT length.

AB - We present a single wall carbon nanotube (SWCNT) based high frequency resonator fabricated using a novel process suitable for mass fabrication. The integration of the electrostatically actuated SWCNT into the silicon structure was achieved by a specially tailored fabrication process which is characterized by simplicity and compatibility with commonly used micro-machining processes. The fabrication process enables the control of the SWCNT positioning and its length and results in a taut and clean suspended SWCNT. Electro-mechanical testing of these devices demonstrates a resonance frequency of 13.4 MHz. Resonators with various resonance frequencies can be readily fabricated by varying the SWCNT length.

UR - http://www.scopus.com/inward/record.url?scp=77952774637&partnerID=8YFLogxK

U2 - 10.1109/MEMSYS.2010.5442472

DO - 10.1109/MEMSYS.2010.5442472

M3 - Conference contribution

AN - SCOPUS:77952774637

SN - 9781424457649

T3 - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

SP - 432

EP - 435

BT - MEMS 2010 - The 23rd IEEE International Conference on Micro Electro Mechanical Systems, Technical Digest

T2 - 23rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2010

Y2 - 24 January 2010 through 28 January 2010

ER -

Ya'akobovitz A, Karp G, David-Pur M, Krylov S, Hanein Y. Carbon nanotube self-assembeled high frequency resonator. In MEMS 2010 - The 23rd IEEE International Conference on Micro Electro Mechanical Systems, Technical Digest. 2010. p. 432-435. 5442472. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). doi: 10.1109/MEMSYS.2010.5442472

Carbon nanotube self-assembeled high frequency resonator

Abstract

Publication series

Conference

ASJC Scopus subject areas

UN SDGs

Access to Document

Other files and links

Fingerprint

Cite this