Carbon nanotube self-assembeled high frequency resonator

Assaf Ya'akobovitz, Gabriel Karp, Moshe David-Pur, S. Krylov, Yael Hanein

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

3 Scopus citations

Abstract

We present a single wall carbon nanotube (SWCNT) based high frequency resonator fabricated using a novel process suitable for mass fabrication. The integration of the electrostatically actuated SWCNT into the silicon structure was achieved by a specially tailored fabrication process which is characterized by simplicity and compatibility with commonly used micro-machining processes. The fabrication process enables the control of the SWCNT positioning and its length and results in a taut and clean suspended SWCNT. Electro-mechanical testing of these devices demonstrates a resonance frequency of 13.4 MHz. Resonators with various resonance frequencies can be readily fabricated by varying the SWCNT length.

Original languageEnglish
Title of host publicationMEMS 2010 - The 23rd IEEE International Conference on Micro Electro Mechanical Systems, Technical Digest
Pages432-435
Number of pages4
DOIs
StatePublished - 1 Jun 2010
Externally publishedYes
Event23rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2010 - Hong Kong, China
Duration: 24 Jan 201028 Jan 2010

Publication series

NameProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN (Print)1084-6999

Conference

Conference23rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2010
Country/TerritoryChina
CityHong Kong
Period24/01/1028/01/10

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