Cathodoluminescence study of micro-crack-induced stress relief for AlN films on Si(111)

G. Sarusi, O. Moshe, S. Khatsevich, D. H. Rich, J. Salzman, B. Meyler, M. Shandalov, Y. Golan

Research output: Contribution to journalArticlepeer-review

8 Scopus citations

Fingerprint

Dive into the research topics of 'Cathodoluminescence study of micro-crack-induced stress relief for AlN films on Si(111)'. Together they form a unique fingerprint.

Engineering & Materials Science

Physics & Astronomy

Chemical Compounds