Chalcogenide three-dimensional photonic structures

A. Feigel; Z. Kotler; B. Sfez; A. Arsh; M. Klebanov; V. Lyubin

doi:10.1117/12.426829

Chalcogenide three-dimensional photonic structures

A. Feigel, Z. Kotler, B. Sfez, A. Arsh, M. Klebanov, V. Lyubin

Department of Physics

Research output: Contribution to journal › Article › peer-review

3 Scopus citations

Abstract

AsSeTe/AsSe chalcogenide glasses are photosensitive materials (negative/positive photoresists) with large refractive index. These properties make these glasses suitable for the fabrication of photonic crystals, waveguide components and MOEMS. We present in this article fabrication of three-dimensional photonic crystal composed from AsSeTe and air, with submicron feature size. The method of fabrication is relatively simple and cheap using only vapor deposition and optical holographic lithography. The interferometric alignment allows to eliminate requirement for a mask aligner.

Original language	English
Pages (from-to)	249-251
Number of pages	3
Journal	Proceedings of SPIE - The International Society for Optical Engineering
Volume	4277
DOIs	https://doi.org/10.1117/12.426829
State	Published - 1 Jan 2001

Keywords

Chalcogenide glasses
Three-dimensional photonic crystals

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Computer Science Applications
Applied Mathematics
Electrical and Electronic Engineering

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10.1117/12.426829

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abstract = "AsSeTe/AsSe chalcogenide glasses are photosensitive materials (negative/positive photoresists) with large refractive index. These properties make these glasses suitable for the fabrication of photonic crystals, waveguide components and MOEMS. We present in this article fabrication of three-dimensional photonic crystal composed from AsSeTe and air, with submicron feature size. The method of fabrication is relatively simple and cheap using only vapor deposition and optical holographic lithography. The interferometric alignment allows to eliminate requirement for a mask aligner.",

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AU - Feigel, A.

AU - Kotler, Z.

AU - Sfez, B.

AU - Arsh, A.

AU - Klebanov, M.

AU - Lyubin, V.

PY - 2001/1/1

Y1 - 2001/1/1

N2 - AsSeTe/AsSe chalcogenide glasses are photosensitive materials (negative/positive photoresists) with large refractive index. These properties make these glasses suitable for the fabrication of photonic crystals, waveguide components and MOEMS. We present in this article fabrication of three-dimensional photonic crystal composed from AsSeTe and air, with submicron feature size. The method of fabrication is relatively simple and cheap using only vapor deposition and optical holographic lithography. The interferometric alignment allows to eliminate requirement for a mask aligner.

AB - AsSeTe/AsSe chalcogenide glasses are photosensitive materials (negative/positive photoresists) with large refractive index. These properties make these glasses suitable for the fabrication of photonic crystals, waveguide components and MOEMS. We present in this article fabrication of three-dimensional photonic crystal composed from AsSeTe and air, with submicron feature size. The method of fabrication is relatively simple and cheap using only vapor deposition and optical holographic lithography. The interferometric alignment allows to eliminate requirement for a mask aligner.

KW - Chalcogenide glasses

KW - Three-dimensional photonic crystals

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M3 - Article

AN - SCOPUS:0034944329

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VL - 4277

SP - 249

EP - 251

JO - Proceedings of SPIE - The International Society for Optical Engineering

JF - Proceedings of SPIE - The International Society for Optical Engineering

ER -

Chalcogenide three-dimensional photonic structures

Abstract

Keywords

ASJC Scopus subject areas

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