Keyphrases
Carburization
100%
Corrosion Resistance
100%
Tantalum
100%
RF Plasma
100%
Mechanical Properties
66%
Vol%
66%
Argon
66%
Carburized Layer
66%
Fabrication Conditions
66%
Phase Ratio
33%
X Ray Diffraction
33%
Temperature Programmed Desorption
33%
Chemical Composition
33%
Surface Chemical Composition
33%
Process Duration
33%
Carbide Phase
33%
Phase Composition
33%
Auger Electron Spectroscopy
33%
Mass Spectrometer
33%
Methane
33%
Time-to-treatment
33%
Hydrogen Concentration
33%
Phase Content
33%
Diffusion Profile
33%
Resistance Surface
33%
Substrate Temperature
33%
Electron Temperature
33%
Microindentation
33%
Radio Frequency Plasma
33%
Carbon Film
33%
Methane-hydrogen Mixture
33%
High Hardness
33%
Inductively Coupled
33%
Carbide Layer
33%
Total Gas Pressure
33%
CH4 Concentration
33%
Impedance Analysis
33%
Film Composition
33%
Micro-scratching
33%
Engineering
Torr
100%
Methane
75%
Corrosion Resistance
75%
Phase Ratio
25%
Ray Diffraction
25%
Radio Frequency
25%
Mass Spectrometer
25%
Thin Layer
25%
Substrate Temperature
25%
Main Process Variable
25%
Programmed Temperature
25%
Gas Pressure
25%
Mixture Temperature
25%
Carburizing
25%
Material Science
Corrosion Resistance
100%
Tantalum
100%
Carbide
66%
Desorption
33%
Film
33%
X-Ray Diffraction
33%
Microhardness
33%
Carburization
33%
Auger Electron Spectroscopy
33%
Carbon Films
33%