Chemical bonding in microcrystalline Si:H:Cl films studied by ion-induced Auger Electron Spectroscopy

E. Grossman, A. Grill, M. Polak

Research output: Contribution to journalArticlepeer-review

Original languageEnglish
Pages (from-to)L109-L114
JournalThin Solid Films
Volume173
Issue number1
DOIs
StatePublished - 1 Jun 1989

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