CMOS image sensors: Two-dimensional MTF for anisotropic resolution characterization

Razy Segal, Igor Shcherback, Orly Yadid-Pecht

Research output: Contribution to journalArticlepeer-review

4 Scopus citations


In this paper, the meaning and appropriateness of complementary metal-oxide-semiconductor image sensor (CIS) modulation transfer function (MTF) is reconsidered. Two-dimensional (2-D) submicrometer spot scanning results are presented for industrial CIS, 2-D-MTF, characterizing CIS performance and resolution abilities is extracted and compared with the ideal one-dimensional (1-D) MTF profile estimation calculated for all spatial frequencies. "Inter" and "intra" pixel MTFs emphasizing pixel structure dependencies are defined. The domain of applicability of traditional 1-D sensor characterization methods is shown to be ambiguous and insufficient for modern anisotropic CIS designs, resembling the inability to account for the sensor internal structural effects. Furthermore, it was shown that 2-D characterization provides reliable information and enables better understanding and the most accurate description of device performance. In addition, the advantages (over the commonly referred 1-D-MTF) and necessities of 2-D-MTF are verified experimentally and clearly demonstrated in this paper.

Original languageEnglish
Pages (from-to)947-952
Number of pages6
JournalIEEE Sensors Journal
Issue number6
StatePublished - 1 Jun 2007


  • Active pixel sensor (APS)
  • CMOS image sensor (CIS)
  • Crosstalk (CTK)
  • Modulation transfer function (MTF)
  • Point spread function (PSF)

ASJC Scopus subject areas

  • Instrumentation
  • Electrical and Electronic Engineering


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