Coherence effects in applications of frequency and time domain full field optical coherence tomography to optical metrology

Keyphrases

• Coherence Effect 100%
• Optical Metrology 100%
• Full-field Optical Coherence Tomography 100%
• Layer Thickness 50%
• Simplified Model 50%
• Dispersion Relation 50%
• High numerical Aperture 50%
• Interference Effect 50%
• Frequency of Use 50%
• Inverse Scattering 50%
• Measurement Accuracy 50%
• Coherence Length 50%
• Temporal Coherence 50%
• Spectral Bands 50%
• Axial Resolution 50%
• Annular Aperture 50%
• Scattering Approach 50%
• Low numerical Aperture 50%
• Longitudinal Coherence 50%
• Domain Operations 50%
• Multiple Interferences 50%
• Reflectometry 50%
• Large numerical Aperture 50%
• Spatial Work 50%
• Interference Microscope 50%
• Thin Film Measurement 50%
• Linnik 50%
• Multilayered Structure 50%
• Fourier-domain Optical Coherence Tomography 50%
• Spectrogram 50%

Engineering

• Time Domain 100%
• Frequency Domain 100%
• Numerical Aperture 100%
• Optical Field 100%
• Layer Thickness 33%
• Thin Films 33%
• Coherence Length 33%
• Dispersion Relation 33%
• Spectral Band 33%
• Axial Resolution 33%
• Spectrogram 33%

Physics

• Coherence 100%
• Tomography 100%
• Numerical Aperture 42%
• Thin Films 14%
• Film Thickness 14%
• Inverse Scattering 14%
• Spectral Band 14%
• Spectrogram 14%