Keyphrases
Modeling Approach
100%
Temperature Sensor
100%
Micro-electro-mechanical Systems
100%
V-shaped
100%
System Temperature
100%
Modeling Tools
25%
Governing Equation
25%
Device Performance
25%
Equations of Motion
25%
Internal Stress
25%
High Signal-to-noise Ratio
25%
Nonlinear Large Deflection
25%
Control Solution
25%
Microfabrication
25%
Modeling Results
25%
Simple Fabrication Process
25%
Device Geometry
25%
Solution Scheme
25%
Model Reliability
25%
Force Control
25%
3D Finite Element Analysis
25%
Output Force
25%
Temperature-dependent Properties
25%
Capacitive Sensing
25%
Stiffness Force
25%
Deflection Force
25%
Engineering
System Temperature
100%
Microelectromechanical System
100%
Thermal Sensor
100%
Finite Element Method
25%
Fits and Tolerances
25%
Signal-to-Noise Ratio
25%
Device Performance
25%
Control Force
25%
Internal Stress
25%
Microfabrication
25%
Good Performance
25%
Dependent Property
25%
Capacitive
25%
Output Force
25%
Material Science
Microelectromechanical System
100%
Finite Element Method
25%
Signal-to-Noise Ratio
25%
Microfabrication
25%