Comparison of strain in glow discharge a-Si:F and a-Si:H

R. Weil, I. Abdulhalim, R. Beserman, M. Janai, B. Pratt

Research output: Contribution to journalArticlepeer-review

10 Scopus citations

Abstract

Raman scattering experiments were performed on a-Si:H and a-Si:F samples which had the same electron spin density and dark conductivity. It was found that the a-Si:F had a wider Raman spectrum than a-Si:H. This implies that there is a narrower bond angle distribution in the a-Si:H sample. This is consistent with the hypothesis that in addition to satisfying dangling bonds in a-Si, H also relieves strain in the sample. This proposition was reinforced by the widening of the Raman spectra of a-Si:H samples taken after H evolution.

Original languageEnglish
Pages (from-to)261-264
Number of pages4
JournalJournal of Non-Crystalline Solids
Volume77-78
Issue numberPART 1
DOIs
StatePublished - 2 Dec 1985
Externally publishedYes

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Ceramics and Composites
  • Condensed Matter Physics
  • Materials Chemistry

Fingerprint

Dive into the research topics of 'Comparison of strain in glow discharge a-Si:F and a-Si:H'. Together they form a unique fingerprint.

Cite this