Conductivity and the hall coefficient of nanostructured titanium nitride films

R. A. Andrievski, Z. M. Dashevsky, G. V. Kalinnikov

Research output: Contribution to journalArticlepeer-review

23 Scopus citations

Abstract

The conductivity and the Hall coefficient of nanostructured TiN films synthesized by nonreactive RF magnetron sputtering have been experimentally studied. The mechanism of conductivity and the role of grain size are discussed.

Original languageEnglish
Pages (from-to)930-932
Number of pages3
JournalTechnical Physics Letters
Volume30
Issue number11
DOIs
StatePublished - 1 Dec 2004

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