Controlled Spacing between Nanopatterned Regions in Block Copolymer Films Obtained by Utilizing Substrate Topography for Local Film Thickness Differentiation

Elisheva Michman, Marcel Langenberg, Roland Stenger, Meirav Oded, Mark Schvartzman, Marcus Müller, Roy Shenhar

Research output: Contribution to journalArticlepeer-review

19 Scopus citations

Fingerprint

Dive into the research topics of 'Controlled Spacing between Nanopatterned Regions in Block Copolymer Films Obtained by Utilizing Substrate Topography for Local Film Thickness Differentiation'. Together they form a unique fingerprint.

Keyphrases

Material Science