Crystallization of amorphous silicon films using a multistep thermal annealing process

E. Korin, R. Reif, B. Mikic

Research output: Contribution to journalArticlepeer-review

20 Scopus citations

Fingerprint

Dive into the research topics of 'Crystallization of amorphous silicon films using a multistep thermal annealing process'. Together they form a unique fingerprint.

Keyphrases

Engineering

Material Science