Data mining for improving a cleaning process in the semiconductor industry

Keyphrases

• Cleaning Methods 100%
• Semiconductor Industry 100%
• Microcontaminants 100%
• Data Mining Methodology 100%
• Semiconductors 50%
• Highly Effective 50%
• Neural Network 50%
• Negative Impact 50%
• Physical Parameters 50%
• Laser Beams 50%
• Complex Interactions 50%
• Classification Basis 50%
• Data Mining Techniques 50%
• Chemical Parameters 50%
• Decision Tree Induction 50%
• Online Monitoring 50%
• Individual Classifiers 50%
• Clean Technology 50%
• Wafer Yield 50%
• Dry Cleaning 50%
• Data Mining Applications 50%
• Device Geometry 50%
• Classifier Architecture 50%
• Contamination Problem 50%

Computer Science

• Data Mining 100%
• Neural Network 25%
• Data Mining Technique 25%
• Decision Tree Induction 25%
• Negative Impact 25%
• Individual Classifier 25%