Determination of the average pore-size and total porosity in porous silicon layers by image processing of SEM micrographs

Paz Elia, Einat Nativ-Roth, Yehuda Zeiri, Ze'ev Porat

Research output: Contribution to journalArticlepeer-review

41 Scopus citations

Abstract

This work describes a method for measuring the average pore size and the determination of the porosity of porous silicon (PSi) layers, which involves image processing of top-view SEM micrographs. The processing program can measure the total area of the pores and calculate its proportion to the total scanned area. In cases where the pores are longitudinal, uniform and non-branched, as evident from cross-section images, it is assumed that it represents also the ratio between the total volume of the pores to the volume of the entire layer, which defines the porosity of the layer. Our results are in good agreement with the literature values that were obtained by two physical methods.

Original languageEnglish
Pages (from-to)465-471
Number of pages7
JournalMicroporous and Mesoporous Materials
Volume225
DOIs
StatePublished - 1 May 2016

Keywords

  • Image processing
  • Pore-size
  • Porosity
  • Porous silicon

ASJC Scopus subject areas

  • Chemistry (all)
  • Materials Science (all)
  • Condensed Matter Physics
  • Mechanics of Materials

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