Development of a large high-performance 2-D array of GaAs-AlGaAs multiple quantum-well modulators

Uriel Arad, Eddie Redmard, Moshe Shamay, Arkadi Averboukh, Shimon Levit, Uzi Efron

Research output: Contribution to journalArticlepeer-review

33 Scopus citations

Abstract

We present the development of an ultrafast two-dimensional (288 × 132 elements) reflection modulator array based on GaAs-AlGaAs multiple quantum-wells embedded in asymmetric Fabry-Pérot structure. The array has low operation voltage (< 4 V), low insertion loss, and high contrast ratio at ∼846 nm. This array was hybridized to 0.25 um complementary metal-oxide-semiconductor driver providing 256 gray levels resolution at frame rate of 50 kHz (driver limited). Major progress in reducing the severe nonuniformity problem of the cavity resonance wavelength in such devices to less than 3.4 nm variation across a 4-in wafer was achieved.

Original languageEnglish
Pages (from-to)1531-1533
Number of pages3
JournalIEEE Photonics Technology Letters
Volume15
Issue number11
DOIs
StatePublished - 1 Nov 2003

Keywords

  • Arrays
  • Excitons
  • Fabry-Pérot resonators
  • Optical correlators
  • Quantum wells
  • Quantum-confined Stark effect
  • Spatial light modulators
  • Ultrahigh-frequency modulation

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