TY - JOUR
T1 - Direct nanoimprint of chalcogenide glasses with optical functionalities via solvent-based surface softening
AU - Shalit, Sivan Tzadka
AU - Ostrovsky, Natali
AU - Shefa, Hadar Frankenstein
AU - Kassis, Evyatar
AU - Joseph, Shay
AU - Schvartzman, Mark
N1 - Publisher Copyright:
© 2022 Optica Publishing Group.
PY - 2022/7/18
Y1 - 2022/7/18
N2 - Chalcogenide glasses are attractive materials for optical applications. However, these applications often require patterning of the surface with functional micro-/ nanostructures. Such patterning is challenging by traditional microfabrication methods. Here, we present a new, to the best of our knowledge, approach of direct imprint via solvent-based surface softening, for the patterning of As2Se3 surface. Our approach is based on an elastomeric stamp soaked in an organic solvent. During the imprint, the solvent diffuses into the imprinted substrate, plasticizes its surface, and thereby allows its imprint at the temperature below its glass transition point. Thus, our approach combines the full pattern transfer with the maintenance of the shape of the imprinted substrate, which is necessary for optical devices. By using this approach, we demonstrated functional antireflective microstructures directly imprinted on As2Se3 surface. Furthermore, we showed that our approach can produce imprinted features sized down to 20 nm scale. We believe that our new approach paves the way for more future applications of chalcogenide glasses.
AB - Chalcogenide glasses are attractive materials for optical applications. However, these applications often require patterning of the surface with functional micro-/ nanostructures. Such patterning is challenging by traditional microfabrication methods. Here, we present a new, to the best of our knowledge, approach of direct imprint via solvent-based surface softening, for the patterning of As2Se3 surface. Our approach is based on an elastomeric stamp soaked in an organic solvent. During the imprint, the solvent diffuses into the imprinted substrate, plasticizes its surface, and thereby allows its imprint at the temperature below its glass transition point. Thus, our approach combines the full pattern transfer with the maintenance of the shape of the imprinted substrate, which is necessary for optical devices. By using this approach, we demonstrated functional antireflective microstructures directly imprinted on As2Se3 surface. Furthermore, we showed that our approach can produce imprinted features sized down to 20 nm scale. We believe that our new approach paves the way for more future applications of chalcogenide glasses.
UR - http://www.scopus.com/inward/record.url?scp=85139888752&partnerID=8YFLogxK
U2 - 10.1364/OE.462448
DO - 10.1364/OE.462448
M3 - Article
C2 - 36236818
AN - SCOPUS:85139888752
SN - 1094-4087
VL - 30
SP - 26229
EP - 26237
JO - Optics Express
JF - Optics Express
IS - 15
ER -