Abstract
Accurate planning of produced quantities is a challenging task in semiconductor industry where the percentage of good parts (measured by yield) is affected by multiple factors. However, conventional data mining methods that are designed and tuned on "well-behaved" data tend to produce a large number of complex and hardly useful patterns when applied to manufacturing databases. This paper presents a novel, perception-based method, called Automated Perceptions Network (APN), for automated construction of compact and interpretable models from highly noisy data sets. We evaluate the method on yield data of two semiconductor products and describe possible directions for the future use of automated perceptions in data mining and knowledge discovery.
Original language | English |
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Pages (from-to) | 137-152 |
Number of pages | 16 |
Journal | Robotics and Autonomous Systems |
Volume | 49 |
Issue number | 3-4 |
DOIs | |
State | Published - 31 Dec 2004 |
Keywords
- Automated Perceptions Network
- Data mining
- Info-Fuzzy Network
- Knowledge discovery
- Yield management
ASJC Scopus subject areas
- Control and Systems Engineering
- Software
- General Mathematics
- Computer Science Applications