AlN/Ti bilayers were heat treated at 600°C for 1, 3, 5, and 10 h. The reaction between AlN and Ti resulted in a phase sequence of AlN/Al3Ti/Ti2N+Ti3Al/Ti3Al+ alpha;(Ti,Al)ss. The determining role of the initial condition in determining the intermediate phase sequence in thin films was emphasized.
|Number of pages||10|
|Journal||Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films|
|State||Published - 1 May 2002|
ASJC Scopus subject areas
- Condensed Matter Physics
- Surfaces and Interfaces
- Surfaces, Coatings and Films