Early stages of interface reactions between AIN and Ti thin films

M. Pinkas; N. Frage; N. Froumin; J. Pelleg; M. P. Dariel

doi:10.1116/1.1472417

Early stages of interface reactions between AIN and Ti thin films

M. Pinkas, N. Frage, N. Froumin, J. Pelleg, M. P. Dariel

Department of Materials Engineering

Research output: Contribution to journal › Article › peer-review

14 Scopus citations

Abstract

AlN/Ti bilayers were heat treated at 600°C for 1, 3, 5, and 10 h. The reaction between AlN and Ti resulted in a phase sequence of AlN/Al₃Ti/Ti₂N+Ti₃Al/Ti₃Al+ alpha;(Ti,Al)_ss. The determining role of the initial condition in determining the intermediate phase sequence in thin films was emphasized.

Original language	English
Pages (from-to)	887-896
Number of pages	10
Journal	Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Volume	20
Issue number	3
DOIs	https://doi.org/10.1116/1.1472417
State	Published - 1 May 2002

ASJC Scopus subject areas

Condensed Matter Physics
Surfaces and Interfaces
Surfaces, Coatings and Films

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abstract = "AlN/Ti bilayers were heat treated at 600°C for 1, 3, 5, and 10 h. The reaction between AlN and Ti resulted in a phase sequence of AlN/Al3Ti/Ti2N+Ti3Al/Ti3Al+ alpha;(Ti,Al)ss. The determining role of the initial condition in determining the intermediate phase sequence in thin films was emphasized.",

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AU - Pinkas, M.

AU - Frage, N.

AU - Froumin, N.

AU - Pelleg, J.

AU - Dariel, M. P.

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N2 - AlN/Ti bilayers were heat treated at 600°C for 1, 3, 5, and 10 h. The reaction between AlN and Ti resulted in a phase sequence of AlN/Al3Ti/Ti2N+Ti3Al/Ti3Al+ alpha;(Ti,Al)ss. The determining role of the initial condition in determining the intermediate phase sequence in thin films was emphasized.

AB - AlN/Ti bilayers were heat treated at 600°C for 1, 3, 5, and 10 h. The reaction between AlN and Ti resulted in a phase sequence of AlN/Al3Ti/Ti2N+Ti3Al/Ti3Al+ alpha;(Ti,Al)ss. The determining role of the initial condition in determining the intermediate phase sequence in thin films was emphasized.

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Early stages of interface reactions between AIN and Ti thin films

Abstract

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