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Effect of film history on the change in its properties under irradiation
M. G. Abraizov,
I. A. Chaikovskii
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peer-review
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Keyphrases
Irradiation
100%
History of Film
100%
Annealing
66%
Temperature Coefficient of Resistance
50%
Resistivity
16%
Material Properties
16%
Electrical Properties
16%
Change Patterns
16%
Low Energy
16%
Absolute Value
16%
Negative Value
16%
Ion Bombardment
16%
Annealed Films
16%
Thermal Evaporation
16%
Resistance to Change
16%
Evaporation Time
16%
Residual Pressure
16%
Engineering
Temperature Coefficient of the Resistance
100%
Initial State
33%
Positive Value
33%
Absolute Value
33%
Ion Implantation
33%
Resistance Change
33%
Negative Value
33%
Residual Pressure
33%
Material Science
Film
100%
Electrical Resistivity
10%
Annealing
10%
Materials Property
10%
Ion Implantation
10%
Food Science
Thermal Evaporation
100%