Effect of Silicon Conductivity and HF/H₂O₂ Ratio on Morphology of Silicon Nanostructures Obtained via Metal-Assisted Chemical Etching

Keyphrases

• Hydrogen Peroxide 100%
• Silicon Nanostructures 100%
• Hydrofluoric Acid 100%
• Metal-assisted Chemical Etching 100%
• Nanowire Morphology 40%
• Aqueous Solution 20%
• Silicon Substrate 20%
• Morphological Changes 20%
• Sidewall 20%
• Etchant 20%
• Etching Time 20%
• High-resistivity Silicon Substrate 20%
• Substrate Resistivity 20%
• Low-resistivity Silicon Substrates 20%

Material Science

• Hydrogen Peroxide 100%
• Silicon 100%
• Nanocrystalline Material 100%
• Electrical Resistivity 50%
• Silver 33%
• Nanowire 33%
• Morphology 16%
• Solution 16%