TY - GEN
T1 - Experimental investigation on mode coupling of bulk mode silicon MEMS resonators
AU - Yang, Yushi
AU - Ng, Eldwin
AU - Polunin, Pavel
AU - Chen, Yunhan
AU - Strachan, Scott
AU - Hong, Vu
AU - Ahn, Chae Hyuck
AU - Shoshani, Ori
AU - Shaw, Steven
AU - Dykman, Mark
AU - Kenny, Thomas
N1 - Publisher Copyright:
© 2015 IEEE.
PY - 2015/2/26
Y1 - 2015/2/26
N2 - This paper demonstrates the effect of nonlinear elasticity on the coupling between different bulk modes of silicon MEMS resonators. From experimental data, we observe that the coupling has a strong dependence on the resonant mode order, the mode shape of the coupled modes, as well as the doping type / concentration, and crystal orientation, leading to a variety of complex and potentially useful phenomena.
AB - This paper demonstrates the effect of nonlinear elasticity on the coupling between different bulk modes of silicon MEMS resonators. From experimental data, we observe that the coupling has a strong dependence on the resonant mode order, the mode shape of the coupled modes, as well as the doping type / concentration, and crystal orientation, leading to a variety of complex and potentially useful phenomena.
UR - http://www.scopus.com/inward/record.url?scp=84931039641&partnerID=8YFLogxK
U2 - 10.1109/MEMSYS.2015.7051132
DO - 10.1109/MEMSYS.2015.7051132
M3 - Conference contribution
AN - SCOPUS:84931039641
T3 - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
SP - 1008
EP - 1011
BT - 2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015
PB - Institute of Electrical and Electronics Engineers
T2 - 2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015
Y2 - 18 January 2015 through 22 January 2015
ER -