Experimental investigation on mode coupling of bulk mode silicon MEMS resonators

Yushi Yang, Eldwin Ng, Pavel Polunin, Yunhan Chen, Scott Strachan, Vu Hong, Chae Hyuck Ahn, Ori Shoshani, Steven Shaw, Mark Dykman, Thomas Kenny

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

15 Scopus citations

Abstract

This paper demonstrates the effect of nonlinear elasticity on the coupling between different bulk modes of silicon MEMS resonators. From experimental data, we observe that the coupling has a strong dependence on the resonant mode order, the mode shape of the coupled modes, as well as the doping type / concentration, and crystal orientation, leading to a variety of complex and potentially useful phenomena.

Original languageEnglish
Title of host publication2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages1008-1011
Number of pages4
EditionFebruary
ISBN (Electronic)9781479979554
DOIs
StatePublished - 26 Feb 2015
Externally publishedYes
Event2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015 - Estoril, Portugal
Duration: 18 Jan 201522 Jan 2015

Publication series

NameProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
NumberFebruary
Volume2015-February
ISSN (Print)1084-6999

Conference

Conference2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015
Country/TerritoryPortugal
CityEstoril
Period18/01/1522/01/15

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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