Experimental study of the optical properties of LTCVD SiO2

Keyphrases

• Optical Properties 100%
• Silica 100%
• Silane 66%
• Refractive Index 66%
• Absorption Bands 66%
• Dense Layer 33%
• Infrared Absorption 33%
• Good Control 33%
• Infrared Properties 33%
• Growth Temperature 33%
• Uniform Layer 33%
• Nitrogen Atmosphere 33%
• Low Temperature Thermal Decomposition 33%
• Bouguer Law 33%
• Carrier Gas Flow Rate 33%
• Nitrogen Carrier Gas 33%

Engineering

• Refractive Index 100%
• Experimental Result 50%
• Low-Temperature 50%
• Gas Flowrate 50%
• Dense Layer 50%
• Constant Value 50%
• Carrier Gas 50%
• Infrared Absorption 50%
• Growth Temperature 50%
• Bouguer 50%

Material Science

• Optical Property 100%
• Silane 100%
• Refractive Index 100%
• Film 50%
• Gas Flow 50%
• Absorption Spectrum 50%