Fabrication and testing of microlens arrays for the IR based on chalcogenide glassy resists

N. P. Eisenberg; M. Manevich; M. Klebanov; V. Lyubin; S. Shtutina

doi:10.1016/0022-3093(96)00118-4

Fabrication and testing of microlens arrays for the IR based on chalcogenide glassy resists

N. P. Eisenberg, M. Manevich, M. Klebanov, V. Lyubin, S. Shtutina

Department of Physics

Research output: Contribution to journal › Article › peer-review

38 Scopus citations

Abstract

A new technique of microlens fabrication using inorganic chalcogenide photoresists is presented. High refractive index that is characteristic of chalcogenide photoresist films and correspondingly, the optical power of the microlenses, can be increased by means of silver photodoping of the ready-made microlens array. Unique properties of chalcogenide photoresists create new possibilities for the development of microoptical components for the IR. Microlens arrays on the base of As-S and As-Se photoresists were fabricated and tested.

Original language	English
Pages (from-to)	766-768
Number of pages	3
Journal	Journal of Non-Crystalline Solids
Volume	198-200
Issue number	PART 2
DOIs	https://doi.org/10.1016/0022-3093(96)00118-4
State	Published - 1 Jan 1996

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Ceramics and Composites
Condensed Matter Physics
Materials Chemistry

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10.1016/0022-3093(96)00118-4

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abstract = "A new technique of microlens fabrication using inorganic chalcogenide photoresists is presented. High refractive index that is characteristic of chalcogenide photoresist films and correspondingly, the optical power of the microlenses, can be increased by means of silver photodoping of the ready-made microlens array. Unique properties of chalcogenide photoresists create new possibilities for the development of microoptical components for the IR. Microlens arrays on the base of As-S and As-Se photoresists were fabricated and tested.",

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AU - Eisenberg, N. P.

AU - Manevich, M.

AU - Klebanov, M.

AU - Lyubin, V.

AU - Shtutina, S.

PY - 1996/1/1

Y1 - 1996/1/1

N2 - A new technique of microlens fabrication using inorganic chalcogenide photoresists is presented. High refractive index that is characteristic of chalcogenide photoresist films and correspondingly, the optical power of the microlenses, can be increased by means of silver photodoping of the ready-made microlens array. Unique properties of chalcogenide photoresists create new possibilities for the development of microoptical components for the IR. Microlens arrays on the base of As-S and As-Se photoresists were fabricated and tested.

AB - A new technique of microlens fabrication using inorganic chalcogenide photoresists is presented. High refractive index that is characteristic of chalcogenide photoresist films and correspondingly, the optical power of the microlenses, can be increased by means of silver photodoping of the ready-made microlens array. Unique properties of chalcogenide photoresists create new possibilities for the development of microoptical components for the IR. Microlens arrays on the base of As-S and As-Se photoresists were fabricated and tested.

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JF - Journal of Non-Crystalline Solids

IS - PART 2

ER -

Fabrication and testing of microlens arrays for the IR based on chalcogenide glassy resists

Abstract

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