Fabrication and testing of microlens arrays for the IR based on chalcogenide glassy resists

N. P. Eisenberg, M. Manevich, M. Klebanov, V. Lyubin, S. Shtutina

Research output: Contribution to journalArticlepeer-review

36 Scopus citations

Abstract

A new technique of microlens fabrication using inorganic chalcogenide photoresists is presented. High refractive index that is characteristic of chalcogenide photoresist films and correspondingly, the optical power of the microlenses, can be increased by means of silver photodoping of the ready-made microlens array. Unique properties of chalcogenide photoresists create new possibilities for the development of microoptical components for the IR. Microlens arrays on the base of As-S and As-Se photoresists were fabricated and tested.

Original languageEnglish
Pages (from-to)766-768
Number of pages3
JournalJournal of Non-Crystalline Solids
Volume198-200
Issue numberPART 2
DOIs
StatePublished - 1 Jan 1996

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