Fabrication of polymeric grating layers and their integration into optoelectronic devices using dip-pen nanolithography

Moshe Zohar, Roy Avrahamy, Benny Milgrom, Zeev Fradkin, Mark Auslender

Research output: Contribution to journalConference articlepeer-review

Abstract

Two-dimensional optical nanostructures grating based on polymers were fabricated using dip-pen nanolithography. We investigated the influence of both the ink composition and dwell-time. Prototypes of phase masks were manufactured, and their main characteristics were analyzed.

Original languageEnglish
Article numberJTh3A.50
JournalOptics InfoBase Conference Papers
StatePublished - 1 Jan 2021
EventCLEO: QELS_Fundamental Science, CLEO: QELS 2021 - Part of Conference on Lasers and Electro-Optics, CLEO 2021 - Virtual, Online, United States
Duration: 9 May 202114 May 2021

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Mechanics of Materials

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