Abstract
Dip-pen nanolithography (DPN) is a low-cost, versatile, bench-top technology for direct patterning of materials over surfaces. Our study reports on the production of two-dimensional optical grating nanostructures based on polymers, using DPN. The influence of both the ink composition and the dwell time were investigated. Prototypes of phase masks were manufactured, and their main characteristics were analyzed. The results in our work may contribute to improving the fabrication process of optical structures, including the production of microlenses with controlled focal length.
Original language | English |
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Article number | 013501 |
Journal | Journal of Micro/ Nanolithography, MEMS, and MOEMS |
Volume | 19 |
Issue number | 1 |
DOIs | |
State | Published - 1 Jan 2020 |
Keywords
- Dip-pen nanolithography
- Phase mask
- Pv cell
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Atomic and Molecular Physics, and Optics
- Condensed Matter Physics
- Mechanical Engineering
- Electrical and Electronic Engineering