Fabrication of sub-μm bipolar transistor structures by scanning probe microscopy

Keyphrases

• Electric Field (E-field) 100%
• Scanning Probe Microscopy 100%
• Bipolar Transistor 100%
• Transistor Structure 100%
• Semiconductors 50%
• Device Structure 50%
• Dopant 50%
• CuInSe2 50%
• Thermally Assisted 50%
• Atomic Force Microscope Tips 50%
• Capacitance Model 50%
• Doping Profile 50%
• Capacitance Measurement 50%
• Electromigration 50%
• Spreading Resistance 50%
• Inhomogeneous Doping 50%
• Small Devices 50%
• Scanning Capacitance 50%

Material Science

• Transistor 100%
• Doping (Additives) 100%
• Bipolar Transistor 100%
• Capacitance Measurement 100%