Far UV pulsed laser melting of silicon

G. Gorodetsky, Jerzy Kanicki, T. Kazyaka, R. L. Melcher

Research output: Contribution to journalArticlepeer-review

51 Scopus citations

Abstract

Calorimetric, acoustic, and morphological studies of silicon irradiated with intense 14-ns, 193-nm excimer laser pulses are reported. To within the experimental uncertainty, the entire radiation absorbed is converted to heat at all fluences. The volume changes on melting leads to enhanced acoustic wave generation. The morphology of the surface damage is consistent with the existence of both standing surface acoustic waves and of capillary waves.

Original languageEnglish
Pages (from-to)547-549
Number of pages3
JournalApplied Physics Letters
Volume46
Issue number6
DOIs
StatePublished - 1 Dec 1985
Externally publishedYes

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

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