Far UV pulsed laser melting of silicon

G. Gorodetsky; Jerzy Kanicki; T. Kazyaka; R. L. Melcher

doi:10.1063/1.95533

Far UV pulsed laser melting of silicon

G. Gorodetsky, Jerzy Kanicki, T. Kazyaka, R. L. Melcher

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Abstract

Calorimetric, acoustic, and morphological studies of silicon irradiated with intense 14-ns, 193-nm excimer laser pulses are reported. To within the experimental uncertainty, the entire radiation absorbed is converted to heat at all fluences. The volume changes on melting leads to enhanced acoustic wave generation. The morphology of the surface damage is consistent with the existence of both standing surface acoustic waves and of capillary waves.

Original language	English
Pages (from-to)	547-549
Number of pages	3
Journal	Applied Physics Letters
Volume	46
Issue number	6
DOIs	https://doi.org/10.1063/1.95533
State	Published - 1 Jan 1985
Externally published	Yes

ASJC Scopus subject areas

Physics and Astronomy (miscellaneous)

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title = "Far UV pulsed laser melting of silicon",

abstract = "Calorimetric, acoustic, and morphological studies of silicon irradiated with intense 14-ns, 193-nm excimer laser pulses are reported. To within the experimental uncertainty, the entire radiation absorbed is converted to heat at all fluences. The volume changes on melting leads to enhanced acoustic wave generation. The morphology of the surface damage is consistent with the existence of both standing surface acoustic waves and of capillary waves.",

author = "G. Gorodetsky and Jerzy Kanicki and T. Kazyaka and Melcher, {R. L.}",

year = "1985",

month = jan,

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doi = "10.1063/1.95533",

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journal = "Applied Physics Letters",

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T1 - Far UV pulsed laser melting of silicon

AU - Gorodetsky, G.

AU - Kanicki, Jerzy

AU - Kazyaka, T.

AU - Melcher, R. L.

PY - 1985/1/1

Y1 - 1985/1/1

N2 - Calorimetric, acoustic, and morphological studies of silicon irradiated with intense 14-ns, 193-nm excimer laser pulses are reported. To within the experimental uncertainty, the entire radiation absorbed is converted to heat at all fluences. The volume changes on melting leads to enhanced acoustic wave generation. The morphology of the surface damage is consistent with the existence of both standing surface acoustic waves and of capillary waves.

AB - Calorimetric, acoustic, and morphological studies of silicon irradiated with intense 14-ns, 193-nm excimer laser pulses are reported. To within the experimental uncertainty, the entire radiation absorbed is converted to heat at all fluences. The volume changes on melting leads to enhanced acoustic wave generation. The morphology of the surface damage is consistent with the existence of both standing surface acoustic waves and of capillary waves.

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U2 - 10.1063/1.95533

DO - 10.1063/1.95533

M3 - Article

AN - SCOPUS:0011995968

SN - 0003-6951

VL - 46

SP - 547

EP - 549

JO - Applied Physics Letters

JF - Applied Physics Letters

IS - 6

ER -

Far UV pulsed laser melting of silicon

Abstract

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