Flexible planar Hall effect sensor with sub-200 pT resolution

Hariharan Nhalil, Daniel Lahav, Moty Schultz, Shai Amrusi, Asaf Grosz, Lior Klein

Research output: Contribution to journalArticlepeer-review


Flexible sensors are important for applications, such as wearable medical devices, soft robotics, and more, as they can easily conform to soft and irregularly shaped surfaces. This study presents elliptical planar Hall effect magnetic sensors fabricated on a polyamide tape with an equivalent magnetic noise (EMN) better than 200 pT/ Hz . The sensor is characterized in flat and bent states with a bent radius of 10 mm. An EMN of 200 and 400 pT/ Hz in flat and bent states, respectively, is achieved at a frequency of 100 Hz. The remarkable EMN combined with a simple, low-cost fabrication process makes these sensors a promising candidate for flexible electronics.

Original languageEnglish
Article number024102
JournalApplied Physics Letters
Issue number2
StatePublished - 10 Jul 2023

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)


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