Flexible planar Hall effect sensor with sub-200 pT resolution

Hariharan Nhalil; Daniel Lahav; Moty Schultz; Shai Amrusi; Asaf Grosz; Lior Klein

doi:10.1063/5.0156588

Flexible planar Hall effect sensor with sub-200 pT resolution

Hariharan Nhalil, Daniel Lahav, Moty Schultz, Shai Amrusi, Asaf Grosz, Lior Klein

Department of Electrical & Computer Engineering

Research output: Contribution to journal › Article › peer-review

Abstract

Flexible sensors are important for applications, such as wearable medical devices, soft robotics, and more, as they can easily conform to soft and irregularly shaped surfaces. This study presents elliptical planar Hall effect magnetic sensors fabricated on a polyamide tape with an equivalent magnetic noise (EMN) better than 200 pT/ Hz . The sensor is characterized in flat and bent states with a bent radius of 10 mm. An EMN of 200 and 400 pT/ Hz in flat and bent states, respectively, is achieved at a frequency of 100 Hz. The remarkable EMN combined with a simple, low-cost fabrication process makes these sensors a promising candidate for flexible electronics.

Original language	English
Article number	024102
Journal	Applied Physics Letters
Volume	123
Issue number	2
DOIs	https://doi.org/10.1063/5.0156588
State	Published - 10 Jul 2023

ASJC Scopus subject areas

Physics and Astronomy (miscellaneous)

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10.1063/5.0156588

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title = "Flexible planar Hall effect sensor with sub-200 pT resolution",

abstract = "Flexible sensors are important for applications, such as wearable medical devices, soft robotics, and more, as they can easily conform to soft and irregularly shaped surfaces. This study presents elliptical planar Hall effect magnetic sensors fabricated on a polyamide tape with an equivalent magnetic noise (EMN) better than 200 pT/ Hz . The sensor is characterized in flat and bent states with a bent radius of 10 mm. An EMN of 200 and 400 pT/ Hz in flat and bent states, respectively, is achieved at a frequency of 100 Hz. The remarkable EMN combined with a simple, low-cost fabrication process makes these sensors a promising candidate for flexible electronics.",

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AU - Lahav, Daniel

AU - Schultz, Moty

AU - Amrusi, Shai

AU - Grosz, Asaf

AU - Klein, Lior

PY - 2023/7/10

Y1 - 2023/7/10

N2 - Flexible sensors are important for applications, such as wearable medical devices, soft robotics, and more, as they can easily conform to soft and irregularly shaped surfaces. This study presents elliptical planar Hall effect magnetic sensors fabricated on a polyamide tape with an equivalent magnetic noise (EMN) better than 200 pT/ Hz . The sensor is characterized in flat and bent states with a bent radius of 10 mm. An EMN of 200 and 400 pT/ Hz in flat and bent states, respectively, is achieved at a frequency of 100 Hz. The remarkable EMN combined with a simple, low-cost fabrication process makes these sensors a promising candidate for flexible electronics.

AB - Flexible sensors are important for applications, such as wearable medical devices, soft robotics, and more, as they can easily conform to soft and irregularly shaped surfaces. This study presents elliptical planar Hall effect magnetic sensors fabricated on a polyamide tape with an equivalent magnetic noise (EMN) better than 200 pT/ Hz . The sensor is characterized in flat and bent states with a bent radius of 10 mm. An EMN of 200 and 400 pT/ Hz in flat and bent states, respectively, is achieved at a frequency of 100 Hz. The remarkable EMN combined with a simple, low-cost fabrication process makes these sensors a promising candidate for flexible electronics.

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Flexible planar Hall effect sensor with sub-200 pT resolution

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