Fluorinated diamondlike carbon templates for high resolution nanoimprint lithography

M. Schvartzman; A. Mathur; Y. Kang; C. Jahnes; J. Hone; S. J. Wind

doi:10.1116/1.3013281

Fluorinated diamondlike carbon templates for high resolution nanoimprint lithography

M. Schvartzman, A. Mathur, Y. Kang, C. Jahnes, J. Hone, S. J. Wind

Research output: Contribution to journal › Article › peer-review

19 Scopus citations

Abstract

Nanoimprint templates were fabricated from diamondlike carbon (DLC) films grown on Si, using negative-tone e-beam lithography and oxygen plasma etching. An antiadhesion coating was provided through fluorocarbon-based plasma treatment, which was found to form a Teflon-like thin layer on the treated DLC surface. The fluorinated templates were used to imprint arrays of dots with diameters down to 10 nm in polymethyl-methacrylate. Application of the fluorocarbon plasma treatment was also demonstrated in the antiadhesion treatment of the nanoimprint resist and in elastomer molding.

Original language	English
Pages (from-to)	2394-2398
Number of pages	5
Journal	Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume	26
Issue number	6
DOIs	https://doi.org/10.1116/1.3013281
State	Published - 11 Dec 2008
Externally published	Yes

ASJC Scopus subject areas

Condensed Matter Physics
Electrical and Electronic Engineering

Access to Document

10.1116/1.3013281

Cite this

@article{8a3767f91acf4c70bde1445fdce9342a,

title = "Fluorinated diamondlike carbon templates for high resolution nanoimprint lithography",

abstract = "Nanoimprint templates were fabricated from diamondlike carbon (DLC) films grown on Si, using negative-tone e-beam lithography and oxygen plasma etching. An antiadhesion coating was provided through fluorocarbon-based plasma treatment, which was found to form a Teflon-like thin layer on the treated DLC surface. The fluorinated templates were used to imprint arrays of dots with diameters down to 10 nm in polymethyl-methacrylate. Application of the fluorocarbon plasma treatment was also demonstrated in the antiadhesion treatment of the nanoimprint resist and in elastomer molding.",

author = "M. Schvartzman and A. Mathur and Y. Kang and C. Jahnes and J. Hone and Wind, {S. J.}",

note = "Funding Information: The authors thank Kateryna Artyushkova at the University of New Mexico for assistance with XPS measurements and analysis. This work was supported by the National Institutes of Health through the NIH Roadmap for Medical Research under Award No. PN2EY016586 and by the National Science Foundation under Award No. NSF EF-05-07086. Additional support from the Nanoscale Science and Engineering Initiative of the National Science Foundation under NSF Award No. CHE-0641523 and by the New York State Office of Science, Technology, and Academic Research is also gratefully acknowledged. ",

year = "2008",

month = dec,

day = "11",

doi = "10.1116/1.3013281",

language = "English",

volume = "26",

pages = "2394--2398",

journal = "Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures",

issn = "1071-1023",

publisher = "American Institute of Physics",

number = "6",

}

TY - JOUR

T1 - Fluorinated diamondlike carbon templates for high resolution nanoimprint lithography

AU - Schvartzman, M.

AU - Mathur, A.

AU - Kang, Y.

AU - Jahnes, C.

AU - Hone, J.

AU - Wind, S. J.

N1 - Funding Information: The authors thank Kateryna Artyushkova at the University of New Mexico for assistance with XPS measurements and analysis. This work was supported by the National Institutes of Health through the NIH Roadmap for Medical Research under Award No. PN2EY016586 and by the National Science Foundation under Award No. NSF EF-05-07086. Additional support from the Nanoscale Science and Engineering Initiative of the National Science Foundation under NSF Award No. CHE-0641523 and by the New York State Office of Science, Technology, and Academic Research is also gratefully acknowledged.

PY - 2008/12/11

Y1 - 2008/12/11

N2 - Nanoimprint templates were fabricated from diamondlike carbon (DLC) films grown on Si, using negative-tone e-beam lithography and oxygen plasma etching. An antiadhesion coating was provided through fluorocarbon-based plasma treatment, which was found to form a Teflon-like thin layer on the treated DLC surface. The fluorinated templates were used to imprint arrays of dots with diameters down to 10 nm in polymethyl-methacrylate. Application of the fluorocarbon plasma treatment was also demonstrated in the antiadhesion treatment of the nanoimprint resist and in elastomer molding.

AB - Nanoimprint templates were fabricated from diamondlike carbon (DLC) films grown on Si, using negative-tone e-beam lithography and oxygen plasma etching. An antiadhesion coating was provided through fluorocarbon-based plasma treatment, which was found to form a Teflon-like thin layer on the treated DLC surface. The fluorinated templates were used to imprint arrays of dots with diameters down to 10 nm in polymethyl-methacrylate. Application of the fluorocarbon plasma treatment was also demonstrated in the antiadhesion treatment of the nanoimprint resist and in elastomer molding.

UR - http://www.scopus.com/inward/record.url?scp=57249094069&partnerID=8YFLogxK

U2 - 10.1116/1.3013281

DO - 10.1116/1.3013281

M3 - Article

AN - SCOPUS:57249094069

SN - 1071-1023

VL - 26

SP - 2394

EP - 2398

JO - Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

JF - Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

IS - 6

ER -

Fluorinated diamondlike carbon templates for high resolution nanoimprint lithography

Abstract

ASJC Scopus subject areas

Access to Document

Other files and links

Fingerprint

Cite this