Full-field parallel interferometry coherence probe microscope for high-speed optical metrology

A. Safrani, I. Abdulhalim

Research output: Contribution to journalArticlepeer-review

7 Scopus citations

Abstract

Parallel detection of several achromatic phase-shifted images is used to obtain a high-speed, high-resolution, full-field, optical coherence probe tomography system based on polarization interferometry. The high enface imaging speed, short coherence gate, and high lateral resolution provided by the system are exploited to determine microbump height uniformity in an integrated semiconductor chip at 50 frames per second. The technique is demonstrated using the Linnik microscope, although it can be implemented on any polarization-based interference microscopy system.

Original languageEnglish
Pages (from-to)5083-5087
Number of pages5
JournalApplied Optics
Volume54
Issue number16
DOIs
StatePublished - 1 Jun 2015

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics
  • Engineering (miscellaneous)
  • Electrical and Electronic Engineering

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